Designing New Bending Arm Variable Angle Sputtering Platform of Composite Films
HUAN Xi, WANG Wei, HU Gege, WANG Jingnan
China Surface Engineering . 2026, (2): 485 -491 .  DOI: 10.11933/CSE2026052

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering
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