Designing New Bending Arm Variable Angle Sputtering Platform of Composite Films

HUAN Xi, WANG Wei, HU Gege, WANG Jingnan

China Surface Engineering ›› 2026, Vol. 39 ›› Issue (2) : 485-491.

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China Surface Engineering ›› 2026, Vol. 39 ›› Issue (2) : 485-491. DOI: 10.11933/CSE2026052

Designing New Bending Arm Variable Angle Sputtering Platform of Composite Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2026, 39(2): 485-491 https://doi.org/10.11933/CSE2026052

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
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