Mechanism Study of Ion Implantation-assisted Grinding of 4H-SiC Based on Molecular Dynamics
WU Yibo, WU Shujing, WANG Dazhong, CHEN Jiapeng, SONG Yirun, JIANG Feng
China Surface Engineering . 2026, (2): 173 -183 .  DOI: 10.11933/CSE2026303

ISSN 1007-9289　CN 11-3905/TG
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