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Mechanism Study of Ion Implantation-assisted Grinding of 4H-SiC Based on Molecular Dynamics
WU Yibo, WU Shujing, WANG Dazhong, CHEN Jiapeng, SONG Yirun, JIANG Feng
China Surface Engineering ›› 2026, Vol. 39 ›› Issue (2) : 173-183.
PDF(141581 KB)
PDF(141581 KB)
Mechanism Study of Ion Implantation-assisted Grinding of 4H-SiC Based on Molecular Dynamics
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