基于Cu<sub>3</sub>Se<sub>2</sub>固体电解质的离子束沉积金属薄膜及工艺优化应用

Application Research on Ion Beam Deposition of Metal Films Based on Cu₃Se₂ Solid Electrolytes and Process Optimization

ABUDOUWUFU Tushagu, SHU Fengyuan, FU Dejun

China Surface Engineering . 2026, (1): 472 -481 . DOI: 10.11933/CSE2026036

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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