Application Research on Ion Beam Deposition of Metal Films Based on Cu3Se2 Solid Electrolytes and Process Optimization

ABUDOUWUFU Tushagu, SHU Fengyuan, FU Dejun

China Surface Engineering ›› 2026, Vol. 39 ›› Issue (1) : 472-481.

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China Surface Engineering ›› 2026, Vol. 39 ›› Issue (1) : 472-481. DOI: 10.11933/CSE2026036

Application Research on Ion Beam Deposition of Metal Films Based on Cu3Se2 Solid Electrolytes and Process Optimization

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2026, 39(1): 472-481 https://doi.org/10.11933/CSE2026036

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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