(HfMoNbZr)1-xNx薄膜晶体结构和力学性能的氮含量调控

Tuning Crystallographic Structure and Properties of (HfMoNbZr)_1-_xN_x Films by Nitrogen Concentration

WAN Jianqiao, SHI Jie, HU Hengning, ZOU Jiali, WANG Yu, CHEN Yi, TANG Zhengqiang, DU Hao

China Surface Engineering . 2026, (1): 459 -471 . DOI: 10.11933/CSE2026035

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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