Tuning Crystallographic Structure and Properties of (HfMoNbZr)1-xNx Films by Nitrogen Concentration

WAN Jianqiao, SHI Jie, HU Hengning, ZOU Jiali, WANG Yu, CHEN Yi, TANG Zhengqiang, DU Hao

China Surface Engineering ›› 2026, Vol. 39 ›› Issue (1) : 459-471.

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China Surface Engineering ›› 2026, Vol. 39 ›› Issue (1) : 459-471. DOI: 10.11933/CSE2026035

Tuning Crystallographic Structure and Properties of (HfMoNbZr)1-xNx Films by Nitrogen Concentration

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2026, 39(1): 459-471 https://doi.org/10.11933/CSE2026035

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ISSN 1007-9289　CN 11-3905/TG
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