Effect of Pulse Duty Cycle on the Mechanical and Tribological Properties of TiAlTaN Coatings Deposited by Hybird dcMS/HiPIMS Sputtering
NIU Xiaoyan, LIU Mingze, NIU Binbin, MA Qingyan, WANG Yujiang
China Surface Engineering . 2026, (1): 84 -95 .  DOI: 10.11933/CSE2026009