Effect of Pulse Duty Cycle on the Mechanical and Tribological Properties of TiAlTaN Coatings Deposited by Hybird dcMS/HiPIMS Sputtering

NIU Xiaoyan, LIU Mingze, NIU Binbin, MA Qingyan, WANG Yujiang

China Surface Engineering ›› 2026, Vol. 39 ›› Issue (1) : 84-95.

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China Surface Engineering ›› 2026, Vol. 39 ›› Issue (1) : 84-95. DOI: 10.11933/CSE2026009

Effect of Pulse Duty Cycle on the Mechanical and Tribological Properties of TiAlTaN Coatings Deposited by Hybird dcMS/HiPIMS Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2026, 39(1): 84-95 https://doi.org/10.11933/CSE2026009

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ISSN 1007-9289　CN 11-3905/TG
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