Effect of Nitrogen Gas Flow Rate on the Mechanical and Tribological Properties of Ta-Hf-W-N Multi-principal Element Alloy Nitride Films
SONG Mingyu, JING Zhiyuan, XU Zhigang, ZHANG Zhibin, YUAN Haichao, HU Zhenfeng, LIANG Xiubing
China Surface Engineering . 2026, (1): 61 -73 .  DOI: 10.11933/CSE2026007

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering
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