Effect of Nitrogen Gas Flow Rate on the Mechanical and Tribological Properties of Ta-Hf-W-N Multi-principal Element Alloy Nitride Films

SONG Mingyu, JING Zhiyuan, XU Zhigang, ZHANG Zhibin, YUAN Haichao, HU Zhenfeng, LIANG Xiubing

China Surface Engineering ›› 2026, Vol. 39 ›› Issue (1) : 61-73.

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China Surface Engineering ›› 2026, Vol. 39 ›› Issue (1) : 61-73. DOI: 10.11933/CSE2026007

Effect of Nitrogen Gas Flow Rate on the Mechanical and Tribological Properties of Ta-Hf-W-N Multi-principal Element Alloy Nitride Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2026, 39(1): 61-73 https://doi.org/10.11933/CSE2026007

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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