Effects of HiPIMS Frequency on the Microstructure and Properties of TiZrN / TiN Nano-multilayer Film Deposited by a Hybrid Deposition Technique Combining AIP and HiPIMS
WEI Yongqiang, ZHANG Xiaoxiao, ZHANG Huasen, GU Yanyang, YANG Jiale, JIANG Zhiqiang, WEI Chunbei, ZHONG Sujuan
China Surface Engineering . 2025, (5): 312 -325 .  DOI: 10.11933/j.issn.1007-9289.20240326005

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering
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