Effects of HiPIMS Frequency on the Microstructure and Properties of TiZrN / TiN Nano-multilayer Film Deposited by a Hybrid Deposition Technique Combining AIP and HiPIMS

WEI Yongqiang, ZHANG Xiaoxiao, ZHANG Huasen, GU Yanyang, YANG Jiale, JIANG Zhiqiang, WEI Chunbei, ZHONG Sujuan

China Surface Engineering ›› 2025, Vol. 38 ›› Issue (5) : 312-325.

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China Surface Engineering ›› 2025, Vol. 38 ›› Issue (5) : 312-325. DOI: 10.11933/j.issn.1007-9289.20240326005

Effects of HiPIMS Frequency on the Microstructure and Properties of TiZrN / TiN Nano-multilayer Film Deposited by a Hybrid Deposition Technique Combining AIP and HiPIMS

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 38(5): 312-325 https://doi.org/10.11933/j.issn.1007-9289.20240326005

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ISSN 1007-9289　CN 11-3905/TG
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