Removal Mechanism of Single-crystal Silicon Carbide by Ultrasonic-assisted Photocatalytic Polishing
TIAN Zhuangzhi, BAN Xinxing, BA Wenlan, ZHU Jianhui, WANG Ningchang, HUI Zhen, LI Zhengxin
China Surface Engineering . 2025, (5): 171 -181 .  DOI: 10.11933/j.issn.1007-9289.20250122001

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering
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