Research on Static Characteristics of Porous Thrust Bearings for Wafer Grinding Machines
SHI Minghui, ZHANG Guolong, DU Peng, CHEN Jiangyi, HU Hongyang
China Surface Engineering . 2025, (5): 157 -170 .  DOI: 10.11933/j.issn.1007-9289.20250324002