Research on Static Characteristics of Porous Thrust Bearings for Wafer Grinding Machines

SHI Minghui, ZHANG Guolong, DU Peng, CHEN Jiangyi, HU Hongyang

China Surface Engineering ›› 2025, Vol. 38 ›› Issue (5) : 157-170.

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China Surface Engineering ›› 2025, Vol. 38 ›› Issue (5) : 157-170. DOI: 10.11933/j.issn.1007-9289.20250324002

Research on Static Characteristics of Porous Thrust Bearings for Wafer Grinding Machines

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 38(5): 157-170 https://doi.org/10.11933/j.issn.1007-9289.20250324002

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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