Study on the Eddy Current Detection Method for Nano-scale Metal Film Thickness Measurement
LI Hongkai, HAN Zidong, WANG Jinlong, CHEN Mingshang, ZHANG Tong
China Surface Engineering . 2025, (5): 133 -146 .  DOI: 10.11933/j.issn.1007-9289.20250501001

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering
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