Study on the Eddy Current Detection Method for Nano-scale Metal Film Thickness Measurement

LI Hongkai, HAN Zidong, WANG Jinlong, CHEN Mingshang, ZHANG Tong

China Surface Engineering ›› 2025, Vol. 38 ›› Issue (5) : 133-146.

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China Surface Engineering ›› 2025, Vol. 38 ›› Issue (5) : 133-146. DOI: 10.11933/j.issn.1007-9289.20250501001

Study on the Eddy Current Detection Method for Nano-scale Metal Film Thickness Measurement

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 38(5): 133-146 https://doi.org/10.11933/j.issn.1007-9289.20250501001

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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