Research on Tribochemical Mechanism in Chemical Mechanical Polishing of GaAs
GAO Jian, REN Xingyun, LIANG Dexu, ZHANG Honglin, ZHOU Huaicheng, JIANG Liang, YU Bingjun, QIAN Linmao
China Surface Engineering . 2025, (5): 99 -106 .  DOI: 10.11933/j.issn.1007-9289.20241229001

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering
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