Research on Tribochemical Mechanism in Chemical Mechanical Polishing of GaAs

GAO Jian, REN Xingyun, LIANG Dexu, ZHANG Honglin, ZHOU Huaicheng, JIANG Liang, YU Bingjun, QIAN Linmao

China Surface Engineering ›› 2025, Vol. 38 ›› Issue (5) : 99-106.

PDF(16170 KB)
PDF(16170 KB)
China Surface Engineering ›› 2025, Vol. 38 ›› Issue (5) : 99-106. DOI: 10.11933/j.issn.1007-9289.20241229001

Research on Tribochemical Mechanism in Chemical Mechanical Polishing of GaAs

    {{javascript:window.custom_author_en_index=0;}}
  • {{article.zuoZhe_EN}}
Author information +
History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations
{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 38(5): 99-106 https://doi.org/10.11933/j.issn.1007-9289.20241229001

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}
{{article.copyrightLicense_en}}
PDF(16170 KB)

Accesses

Citation

Detail
Sections
Recommended
ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering
Copyright © China Surface Engineering, All Rights Reserved.
Postal Code: 100037　
Tel: (010)88379020/88379056　
E-mail：cse1988@csejournal.com
Visited
Total visitors:　
Visitors of today: 　
Now online:
京ICP备05060958号-16    Powered by Beijing Magtech Co. Ltd,.

/

〈 〉