Research Progress in Abrasive Technology for the Chemical Mechanical Polishing of Chips
MA Jiahui, CHENG Jie, CHEN Jinchi, JIAN Leizhu
China Surface Engineering . 2025, (5): 34 -59 .  DOI: 10.11933/j.issn.1007-9289.20241016001

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering
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