Research Progress in Abrasive Technology for the Chemical Mechanical Polishing of Chips

MA Jiahui, CHENG Jie, CHEN Jinchi, JIAN Leizhu

China Surface Engineering ›› 2025, Vol. 38 ›› Issue (5) : 34-59.

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China Surface Engineering ›› 2025, Vol. 38 ›› Issue (5) : 34-59. DOI: 10.11933/j.issn.1007-9289.20241016001

Research Progress in Abrasive Technology for the Chemical Mechanical Polishing of Chips

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 38(5): 34-59 https://doi.org/10.11933/j.issn.1007-9289.20241016001

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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