Preferred Orientation Tuning and Performance of AlN Films Prepared by Pulsed DC Magnetron Sputtering on Invar 36 Surfaces
WU Yi, TANG Guoliang, LI Wenju, XIAO Shu
China Surface Engineering . 2025, (4): 233 -243 .  DOI: 10.11933/j.issn.1007-9289.20231129001

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering
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