Preferred Orientation Tuning and Performance of AlN Films Prepared by Pulsed DC Magnetron Sputtering on Invar 36 Surfaces

WU Yi, TANG Guoliang, LI Wenju, XIAO Shu

China Surface Engineering ›› 2025, Vol. 38 ›› Issue (4) : 233-243.

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China Surface Engineering ›› 2025, Vol. 38 ›› Issue (4) : 233-243. DOI: 10.11933/j.issn.1007-9289.20231129001

Preferred Orientation Tuning and Performance of AlN Films Prepared by Pulsed DC Magnetron Sputtering on Invar 36 Surfaces

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 38(4): 233-243 https://doi.org/10.11933/j.issn.1007-9289.20231129001

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ISSN 1007-9289　CN 11-3905/TG
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