Effect of Nitrogen Content on Tribological Behavior of CNx Films Deposited by HiPIMS
XING Zhaoyang, WANG Xinfei, YANG Panfeng, ZHANG Bin, WANG Xin
China Surface Engineering . 2025, (3): 272 -284 .  DOI: 10.11933/j.issn.1007-9289.20240306002

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering
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