Effect of Nitrogen Content on Tribological Behavior of CN<em><sub>x</sub></em> Films Deposited by HiPIMS

doi:10.11933/j.issn.1007-9289.20240306002

Effect of Nitrogen Content on Tribological Behavior of CN_x Films Deposited by HiPIMS

XING Zhaoyang, WANG Xinfei, YANG Panfeng, ZHANG Bin, WANG Xin

China Surface Engineering ›› 2025, Vol. 38 ›› Issue (3) : 272-284.

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China Surface Engineering ›› 2025, Vol. 38 ›› Issue (3) : 272-284. DOI: 10.11933/j.issn.1007-9289.20240306002

Effect of Nitrogen Content on Tribological Behavior of CN_x Films Deposited by HiPIMS

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 38(3): 272-284 https://doi.org/10.11933/j.issn.1007-9289.20240306002

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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Received	Revised	Accepted	Published
2024-03-06	2024-08-20	2025-03-20	2025-06-23
Issue Date
2025-07-01

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