Preparation and Surface Properties of Cr Coatings in High-power Pulsed Magnetron Sputtering Tubes with External Auxiliary Anode
WANG Zijia, LI Yuxin, HU Tianshi, TIAN Xiubo, GONG Chunzhi, ZHANG Hui
China Surface Engineering . 2025, (1): 99 -106 .  DOI: 10.11933/j.issn.1007-9289.20240109001