Preparation and Surface Properties of Cr Coatings in High-power Pulsed Magnetron Sputtering Tubes with External Auxiliary Anode

WANG Zijia, LI Yuxin, HU Tianshi, TIAN Xiubo, GONG Chunzhi, ZHANG Hui

China Surface Engineering ›› 2025, Vol. 38 ›› Issue (1) : 99-106.

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China Surface Engineering ›› 2025, Vol. 38 ›› Issue (1) : 99-106. DOI: 10.11933/j.issn.1007-9289.20240109001

Preparation and Surface Properties of Cr Coatings in High-power Pulsed Magnetron Sputtering Tubes with External Auxiliary Anode

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 38(1): 99-106 https://doi.org/10.11933/j.issn.1007-9289.20240109001

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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