Effects of Pulsed Bias Duty Cycle on the Microstructure and Properties of TiCrN Films
WEI Yongqiang, GU Yanyang, FAN Mengyuan, YANG Jiale, ZHANG Huasen, ZHANG Xiaoxiao, ZHONG Sujuan, LIAO Zhiqian
China Surface Engineering . 2023, (6): 57 -67 .  DOI: 10.11933/j.issn.1007-9289.20221230001