Effects of Pulsed Bias Duty Cycle on the Microstructure and Properties of TiCrN Films

doi:10.11933/j.issn.1007-9289.20221230001

WEI Yongqiang, GU Yanyang, FAN Mengyuan, YANG Jiale, ZHANG Huasen, ZHANG Xiaoxiao, ZHONG Sujuan, LIAO Zhiqian

China Surface Engineering ›› 2023, Vol. 36 ›› Issue (6) : 57-67.

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China Surface Engineering ›› 2023, Vol. 36 ›› Issue (6) : 57-67. DOI: 10.11933/j.issn.1007-9289.20221230001

Effects of Pulsed Bias Duty Cycle on the Microstructure and Properties of TiCrN Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 36(6): 57-67 https://doi.org/10.11933/j.issn.1007-9289.20221230001

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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Received	Revised	Published
2022-12-30	2023-11-02	2023-12-20
Issue Date
2023-12-20

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