Molecular Dynamics of the Grinding and Polishing Collaborative-processing on Monocrystalline Silicon
GUO Lei, GUO Pengju, LIU Tiangang, GUO Wanjin, Lü Jingxiang, JIN Qichao
China Surface Engineering . 2024, (2): 199 -210 .  DOI: 10.11933/j.issn.1007-9289.20230315001

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering
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