靶电流对磁控溅射制备TiB<sub>2</sub>薄膜结构及性能的影响

Effect of Target Current on the Structure and Properties of TiB₂ Thin Films Prepared by Magnetron Sputtering

LENG Xiao, LI Hongxuan, JI Li, ZHANG Dingjun

China Surface Engineering . 2024, (5): 147 -157 . DOI: 10.11933/j.issn.1007-9289.20231114002

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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