脉冲峰值电流对HIPIMS/DCMS共沉积制备AlCrTiN涂层性能的影响
贵宾华,周晖,郑军,张延帅,杨拉毛草
Effects of Peak Target Current on Properties of AlCrTiN Coatings Prepared by HIPIMS/DCMS
GUI Bin-hua, ZHOU Hui, ZHENG Jun, ZHANG Yan-shuai and YANGLA Mao-cao
中国表面工程
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2016, (5): 56
-65
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DOI: 10.11933/j.issn.1007-9289.2016.05.007
