含硅无氢非晶碳基薄膜的摩擦磨损性能
王福,谢明玲,张广安,王立平,薛群基
Friction and Wear Properties of Si-containing H-free Amorphous Carbon-based Films
WANG Fu, XIE Ming-ling, ZHANG Guang-an, WANG Li-ping and XUE Qun-ji
中国表面工程
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2017, (1): 93
-100
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DOI: 10.11933/j.issn.1007-9289.20160907001
