离子源循环轰击对磁控溅射TiN薄膜结构和电学性能的影响
邵涛,孙德恩,梁斐珂,黄佳木
Effects of Ion Source Cycle Bombardment on Structure and Electrical Properties of TiN Films Prepared by Magnetron Sputtering
SHAO Tao, SUN De-en, LIANG Fei-ke and HUANG Jia-mu
中国表面工程
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2017, (1): 77
-82
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DOI: 10.11933/j.issn.1007-9289.20160911002
