基于X射线反射研究溅射工艺对CrAlN/TiAlN周期膜界面结构的影响
杜晓明,郑凯峰,王燕,李新喜,张罡,黄朝强
Effects of Sputtering Process on Interfacial Structure of CrAlN/TiAlN Nano-scale Multilayer by X-ray Reflectometry
DU Xiao-ming, ZHENG Kai-feng, WANG Yan, LI Xin-xi, ZHANG Gang and HUANG Chao-qiang
中国表面工程
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2018, (1): 67
-73
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DOI: 10.11933/j.issn.1007-9289.20170822002
