CNx层厚度对DLC/CNx多层膜结构和力学性能的影响
杨芳儿,常新新,林玲玲,龚润泽,周小峰,郑晓华
Effects of Single Layer Thickness of CNx on Microstructure and Mechanical Properties of DLC/CNx Multilayer Films
YANG Fang-er, CHANG Xin-xin, LIN Ling-ling, GONG Run-ze, ZHOU Xiao-feng and ZHENG Xiao-hua
中国表面工程
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2018, (2): 66
-74
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DOI: 10.11933/j.issn.1007-9289.20170823002
