基体温度对反应共溅射TiN/Ni纳米复合膜结构和耐蚀性的影响
贺春林,高建君,王苓飞,陈宏志,付馨莹,马国峰
Effects of Substrate Temperature on Microstructure and Corrosion Resistance of Reactive Magnetron Co-sputtered TiN/Ni Nanocomposite Films
HE Chun-lin, GAO Jian-jun, WANG Ling-fei, CHEN Hong-zhi, FU Xin-ying and MA Guo-feng
中国表面工程
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2018, (2): 85
-93
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DOI: 10.11933/j.issn.1007-9289.20170929002
