抛光垫表面微细结构对抛光性能的影响试验
熊强，蔡伟明，路家斌，刘文涛，李卫中
Experiment on the Effect of Polishing Pad Surface Microstructure on Polishing Performance
XIONG Qiang, CAI Weiming, LU Jiabin, LIU Wentao, LI Weizhong
中国表面工程
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2023, (2): 200
-211
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DOI: 10.11933/j.issn.1007-9289.20220720002
