氧含量对高功率脉冲磁控溅射AlCrSiON涂层高温摩擦学性能的影响
唐鹏,黎海旭,吴正涛,代伟,王启民
Effects of Oxygen Content on High-temperature Tribological Behaviors of AlCrSiON Coatings Deposited by High Power Impulse Magnetron Sputtering
TANG Peng, LI Hai-xu, WU Zheng-tao, DAI Wei and WANG Qi-min
中国表面工程
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2018, (3): 77
-85
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DOI: 10.11933/j.issn.1007-9289.20171031001
