双弯管磁过滤阴极真空弧技术沉积超厚多层钛掺杂类金刚石膜
姜其立,王浩琦,周晗,庞盼,刘建武,廖斌
Ultra-thick Multilayer Ti-doped DLC Films Deposited By Double Bend-tube Magnetic Filter Cathode Vacuum Arc Technology
JIANG Qi-li, WANG Hao-qi, ZHOU Han, PANG Pan, LIU Jian-wu and LIAO Bin
中国表面工程
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2018, (3): 53
-60
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DOI: 10.11933/j.issn.1007-9289.20171201002
