磨粒和抛光垫特性对蓝宝石超声化学机械抛光的影响
钟敏,袁任江,李小兵,陈建锋,许文虎
Effects of Abrasive Particles and Pads’ Characteristics on Ultrasonic Assisted Chemical Mechanical Polishing for Sapphire
ZHONG Min, YUAN Renjiang, LI Xiaobing, CHEN Jianfeng and XU Wenhu
中国表面工程
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2018, (6): 125
-132
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DOI: 10.11933/j.issn.1007-9289.20180824002
