偏压对离子源辅助HiPIMS制备纳米TiN薄膜力学性能和耐蚀性能的影响
贺贞,孙德恩,黄佳木
Effects of Bias Voltage on Mechanical Properties and Corrosion Resistance of TiN Nanostructure Films Prepared by Ion Source Assisted HiPIMS
HE Zhen, SUN Deen and HUANG Jiamu
中国表面工程
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2019, (1): 63
-71
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DOI: 10.11933/j.issn.1007-9289.20180906002
