偏压对自源笼形空心阴极放电制备Si-DLC薄膜结构和性能的影响
孙薇薇,田修波,李慕勤,吴明忠,巩春志,田钦文
Effects of Bias Voltage on Structure and Property of Si-DLC Films Fabricated by Self-source Cage Type Hollow Cathode Discharge Process
SUN Weiwei, TIAN Xiubo, LI Muqin, WU Mingzhong, GONG Chunzhi and TIAN Qinwen
中国表面工程
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2019, (3): 69
-79
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DOI: 10.11933/j.issn.1007-9289.20190114002
