PS-PVD等离子射流特性的光谱诊断研究进展
张岩,邓畅光,毛杰,邓子谦,罗志伟
Research Progress in Spectroscopic Diagnosis of Plasma Jet Characteristics Under PS-PVD
ZHANG Yan, DENG Changguang, MAO Jie, DENG Ziqian and LUO Zhiwei
中国表面工程
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2019, (5): 55
-68
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DOI: 10.11933/j.issn.1007-9289.20190315001
