O2/Ar流量比及退火对氧化锆薄膜结构及摩擦学性能的影响
许文举，鞠鹏飞，李红轩，吉利，刘晓红，陈建敏
Effects of O2 / Ar Flow Ratios and Annealing Treatment on Microstructures and Tribological Properties of Zirconia Films
Xu Wenju, Ju Pengfei, Li Hongxuan, Ji Li, Liu Xiaohong, Chen Jianmin
中国表面工程
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2020, (5): 65
-74
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DOI: 10.11933/j.issn.1007-9289.20200715001
