GLC/成分梯度CNx多层膜的微观结构和摩擦学性能
杨芳儿，陆诗慧，杨烁妍，高蔓斌，郑晓华
Microstructure and Tribological Properties of Magnetron Sputtered Graphite-Like-Carbon / Composition-Gradient CNx Multilayer Films
Yang Fanger, Lu Shihui, Yang Shuoyan, Gao Manbin, Zheng Xiaohua
中国表面工程
.
2020, (6): 68
-76
.
DOI: 10.11933/j.issn.1007-9289.20201013001
