调制比对HiPIMS制备多层DLC薄膜耐腐蚀性能的影响∗
贾昆鹏，王雪，徐锋，施莉莉，赵延超，左敦稳
Effects of Modulation Ratio on Corrosion Resistance of Multilayer DLC Films Prepared by HiPIMS
Jia Kunpeng, Wang Xue, Xu Feng, Shi Lili, Zhao Yanchao, Zuo Dunwen
中国表面工程
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2021, (2): 35
-40
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DOI: 10.11933/j.issn.1007-9289.20210108001
