元素掺杂对类金刚石薄膜摩擦学性能的影响∗
郭培林，贾倩，孟树文，刘广桥，赖振国，文欣宇，张斌
Effect of Element Doping on the Tribological Properties of Diamond-like Carbon Films
GUO Peilin, JIA Qian, MENG Shuwen, LIU Guangqiao, LAI Zhenguo, WEN Xinyu, ZHANG Bin
中国表面工程
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2021, (4): 19
-29
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DOI: 10.11933/j.issn.1007-9289.20210324002
